Micro and Nano Technology Centre

The Micro & Nanotechnology Centre provides state of the art micro and nano fabrication and Research & Development facilities to universities, industry and other STFC departments. The Centre is home to 25 scientists & technicians who have extensive experience in the design, fabrication and test of semiconductor devices.

The Centre has a 30 year old history and has been extensively involved in the development of the field of micro fabrication & MEMS since its conception.

The Centre is divided into five groups, three of which conduct specific areas of research and two of which provide project and facility management;

1. MNT Engineering Applications
2. BioScience MNT
3. Process Development
4. Project Office
5. Facilities

The facilities include ISO Class 5 (FS209 Class 100) cleanrooms which house a variety of equipment for comprehensive fabrication of micro and nano-technology based devices.

Equipment includes:

• Conventional photo-lithography mask aligners (Karl Suss)
• Leica E-Beam direct write tools; EBML 300 and VBR6
• Deposition tools; CVC, DP800, V2000
• Etching systems include both dry and wet etch, STS & System 90
• Metrology & characterising toolsets; Tencor P2, EBL-40 SEM, Hitachi S4000 SEM and NanoSurf AFM

For further information please contact us.